产品详情
LAM 001-4967-17 END EFFECTOR ASSY
LAM 036-8101-00 BELL JAR
LAM 0952-0173-0001 CLAMP, BEAM WIDTH, SLIT
LAM 1-80-0002-023 SENSOR,MEGEASONIC
LAM 10-8886-063 ASSY DISP,HPD,BR#1,HF
LAM 10-8886-064 ASSY DISP,HPD B #2 HF
LAM 11094-101-D-5051 MONOCHROMATOR / DETECTOR, .2 METER
LAM 12-8092-010-001 ASSY CNVYR MOTOR
LAM 12-8800-046 LIFT, T,COMPLETE,2
LAM 12-8800-124 ASSY,CYL POS SENSOR,PNP
LAM 12-8800-202 ROLLER SET
LAM 12-8800-208 ASSY, EXHAUST SNSR CBL, 0.11H
LAM 12-8800-209 ASSY, EXHAUST SNSR CBL, 0.44H
LAM 12-8800-211 ASSY BR H CORE
LAM 12-8882-070 ASSY,SWITCHES,Z-LOCK,CYL,CE96
LAM 12-8892-012 SWITCH, CASS ASSY
LAM 12-9985-038 INTL,CBL HARN. FRAME
LAM 121333000 ROBOT, DRY, ASSY, MODEL#8200-013
LAM 121543400 IFM INTERLOCK ASSY
LAM 122681100 UPPER HEAD LOADER MODULE ASSY
LAM 13-0072-021 SHAFT-PULLEY
LAM 13-0072-022 BRKT. RIGHT SPRING
LAM 13-0072-024 PLT. SPRING SUPPORT
LAM 13-0072-034 PULLEY
LAM 13-0072-077 PULLEY
LAM 13-0072-096 CLAMP, PULLEY
LAM 13-0072-150 MOUNT, BEARING
LAM 13-1000-020 SHAFT BR PORT
LAM 13-1000-030 MOUNT, CYLINDER
LAM 13-8000-167 SHAFT, BRU FRONT
LAM 13-8000-276 ROLLER W/TRACTION ALTERNATE
LAM 13-8800-170 GASKET FLANGE
LAM 13-8800-297 BUSHING,OUTSIDE 1 SHAFT
LAM 13-8800-421 TRUCK,CONVEYOR,BURSH STATION
LAM 13-8800-516 SHAFT,ROLLER ROTATION
LAM 13-8872-031 TIP,BLADE,200MM,X-BEAM
LAM 13-8882-191 SPIN HEAD,BOTTOM
LAM 13-8882-269 BRKT, MOUNTING, SENSOR, SPINDLE
LAM 13-8885-511 BASE,3WAY SOL. VLV.,INTEGRA
LAM 13-8886-081 DOOR SLIDE DISP DWR W/LOCK
LAM 13-8892-169 TRUCK, INPUT STATION
LAM 13-8892-199 PULLEY, REAR, LARGE
LAM 13-8892-203 TRUCK, INPUT REAR, CMP
LAM 130622300 END PLATE, H-FRAME
LAM 130876900 ADAPTER,AB23002,MOTOR
LAM 131281300 NUT PL,SL
LAM 131293500 BAR,PRE-WET,XY PLTN
LAM 131554300 CONTAINMENT COVER,DRIVE
LAM 132665600 BRKT,WHEEL, ADJUSTMENT
LAM 132737300 PL,RBM, 3/4 IN ID
LAM 132773100 BRKT,VALVE MOUNTING,FLUSH
LAM 132797500 COV,MTR, RPC
LAM 132947400 PNL,ACCESS,MAIN AC ASSY
LAM 133083300 BRKT,Z-ACTUATOR,UPPER
LAM 14-8875-046 HRNSS, LIGHT TWR
LAM 14-8882-007 HRNSS, SPINDLE. MTR PRE-PR
LAM 15130-2-R-1410307 RF MATCH
LAM 17180-2-C-0062021 COVER SKIN
LAM 20-0200-252 CD-ROM, SYNERGY MANUALS
LAM 2001384 SENSOR-ROBOT ARM HARNESS
LAM 21-8800-001 CABLE,OPTO-INTERRUPER
LAM 21-8875-004-003 CABLE, SENSOR, EXT. 32 IN
LAM 210-0091-001-A PCB
LAM 2100008 WINDOW TOP QUARTZ
LAM 2100008A WINDOW 4"D X 1/2"T QUARTZ VIEWPORT QUAD-PAID, REV: A
LAM 2100424 BELLOWS RECIPROCATING QUAD
LAM 2100424 BELLOWS RECIPROCATING QUAD
LAM 2100469 WINDOW QUARTZ LASER WINDOW
LAM 2101288 PROCESS CHMBR BELLOWS HEATER
LAM 210824900 CBL#3316 M33-J55/M33-J56
LAM 210857700 CBL,#6,M1-J4/M5-J1,M3-J2,M2-J7
LAM 210865100 CBL#19 M1-J15/M3-J9
LAM 211002300 CBL#3326 M33-J38/PS4
LAM 211126700 CBL#329 M32-J16/M33-J8
LAM 211171000 CBL#1301
LAM 211192500 CBL#608
LAM 211292600 CBL#39
LAM 211363901 CABLE,EPD,24VDC,M03-J15
LAM 211416701 CBL,EMO JUMPER MAIN AC,P17
LAM 212847300 HARN,FEFA, INTERCONNECT BOX
LAM 2200357 #MLA1008-2 WAFER VAC FITTING
LAM 22010504 CUTTER COVER
LAM 2201143-PR CASSETTE BELLOWS ASSEMBLY 2201143-PR
LAM 2201522 PULLEY CASSETTE DRIVE
LAM 2201679 PLUNGER
LAM 2201701 CABLE, WAFER
LAM 222808500 PCBA,CPU, 200 MHZ, 128M RAM
LAM 230-140148-201 CAP,ELCTD,ESC,8'',POTD
LAM 2300750-PR ELECTRODE REFINED BOTTOM MACH
LAM 2301853 INSULATOR-RING 150MM 0.096 CERAMIC
LAM 25233 PCB, KEYBOARD ENCODER
LAM 25418 PCB, ANALOG COND 01 CHAS
LAM 255-00010-000 CONNECTORS, FOR GAS LINE
LAM 255-00042-000 GAS LINE MANIFOLD
LAM 25818 PCB, SERIAL-PARALLEL 01
LAM 26-0072-023 BLADE,LIFT,ASSY
LAM 26-0200-055 KIT SEMI ANN PM SERIES 2
LAM 26-8092-033 KIT, ANNUAL, ERGO
LAM 2600346 PCB-OSC/BUFFER MODULE (F)
LAM 2600446 SUB-ASSY PWR CNTRL MODULE DUAL AMP
LAM 26382 PCB, INTRCNT 01 CHASSIS
LAM 2700234 DETECTOR OPTICAL OXIDEQUAD
LAM 27868 PCB, PC LINK
LAM 28-9975-004 INTL,PC,STPR,BACKPANE,INTEGRA
LAM 2800293 MICROSTEP TRANSLTR MID014-1002
LAM 2800295 PCB-STEPPER INTERFACE ASSY (C)
LAM 2800300 PCB-DISK CONTROL
LAM 2800300 PCB-DISK CONTROL
LAM 2800301 PCB-GRAPHICS CARD
LAM 2800302 PCB-I/O DIGITAL CARD XVM VME
LAM 2800303 PCB-VME A/D CARD XYCOM XVME
LAM 2800304 PCB-VME D/A CARD XYCOM XV (A)
LAM 2800309 PCB OPTICAL SWITCH CASS UP/DN
LAM 2800342 PCB DISK INTERFACE
LAM 2800602 384T SYS INTFC BARE BD
LAM 280473 PCB-STEPPER CPU CARD W/RAM
LAM 286-000751-1 CABLE
LAM 2895048 O-RING W/ ASSY
LAM 290-022890-001 SPACER PC SNAP MOUNT (PACK OF 10)
LAM 2GN120K MOTOR
LAM 30-0007-030 FTG,1/8T x 1/4T , TFE
LAM 30-0028-060 FTG,REDUCER 1/8"TX1/4"PORT
LAM 3000224 LAMP-UVP MERCURY
LAM 3000332 ATHENA-AT16
LAM 3001001 SUB-ASSY DISC DRIVE
LAM 308002 CAPVAR VAC
LAM 31-0004-056 VALVE,DIAPHRAGM,3-WAY MA
LAM 31-0007-009 VALVE, SOLENOID, 24V, 4WAY
LAM 31-0011-002 VALVE,NEEDLE,TEFLON
LAM 31-0013-001 Snolid valve assy
LAM 31-121-025 SWITCH ON/OFF (PACK OF 10)
LAM 32-0006-001 CLAMP, SPLIT HUB.250 ID
LAM 32-0006-004 CLAMP, SPLIT HUB.562 ID
LAM 33-0004-040 SEAL, DYNAMIC .25SHFT PTFE
LAM 33-0004-043 SEAL,ROT,.375IDX.563X3/3
LAM 33-0010-001 BRG.,9MM(W),15MM BORE,32MM
LAM 3401163 VALVE-BONNET NEEDLE 1/4 SW WHITEY
LAM 3409018 FILTER, MICRO
LAM 37-8000-007 BRU PVA
LAM 4000224 BELLOWS 20IN SS
LAM 400255773 VESPEL, HOT EDGE RING, TCP
LAM 42246 PCB, SOL DRV 01 CHASSIS
LAM 42400396 VALVE, PISTON AIR OPERATED
LAM 42738 PCB, SERIAL-PARALLEL 01
LAM 42789 INTRFCE, WFR HNDLR
LAM 43-0003-004 VALVE,N/C,SST DIAPHRAGM
LAM 44-0004-009 RELAY.24V,IOA, 3X3 PDT
LAM 505-017500-353 PKNG,CHAS,MON 14,GF
LAM 515-009821-001 PIN LOCKING
LAM 515-009821-001 PIN LOCKING
LAM 515-010273-001 TOOL, LWR, CHAMBER, COVER
LAM 515-010273-001 TOOL, LWR, CHAMBER, COVER
LAM 515-011835-001 PLATE, 6MM, ELECTRODE, CAL
LAM 515-011835-001 PLATE, 6MM, ELECTRODE, CAL
LAM 515-012168-004 DISC. CAL. ARM. TIGHT POCKET
LAM 515-012168-004 DISC. CAL. ARM. TIGHT POCKET
LAM 515-012168-008 DISC, CLA, ARM TIGHTPKT
LAM 515-012168-008 DISC, CLA, ARM TIGHTPKT
LAM 515-012169-001 TOOL, WAFER CENTERING
LAM 515-021101-001 TOOL, QUAD, SEAL
LAM 515-025713-004 DISC.CALIB W/HOLDER STRIP 4:
LAM 515-025713-004 DISC.CALIB W/HOLDER STRIP 4:
LAM 515-025756-001 TOOL, ALIGNMENT, HTD, PDL, STRPR
LAM 515-028682-002 TOOL, ELCTD SIM, TCP, GAP
LAM 515-11835-001 PLATE
LAM 515-11835-001 PLATE
LAM 515-250015-006 DISK, CALN, PINNED LFTR
LAM 515-250015-008 DISK,CALN,PINNED LFTR
LAM 526 ROLLER BEARING
LAM 53593 PCB, MICRO-TRAC STD LINK
LAM 54-0001-003 DRIVE,HARD,6.4 GB,IDE
LAM 600-000277-001 MOTOR W/ POWER SUPPLY
LAM 600-10359-101 PCB, CPU
LAM 600865 THERMOCOUPLE TYPE J .062384-T
LAM 6008825 THERMOCOUPLE TYPE J .062384-T
LAM 600974 PCB-GALIT DMC-300-10 ASSY
LAM 601035 ISOLATOR DISH GAS FEED
LAM 601109 FILTER-CART WATER 30 MICRON
LAM 601179 BAFFLE-BOTTOM 100-125-150MM
LAM 601224 BAFFLE-TOP 100-125-150MM
LAM 601699 RETAINER TUBE WELDMENT ASSY
LAM 602218 CONNECTOR-RF TO CABLE
LAM 602250 RING INSULATOR 150MM 0.096 QTZ
LAM 605-00535-000 PCAP,MFC,TESTPOINT,B/O BD
LAM 605-016006-002 PCB,CRT ADAPTER BOARD
LAM 605-090833-001 FLOW READOUT PANEL
LAM 605-090834-001 PCB M&W INTERFACE
LAM 605-093605-001 MDL, DGTL, I/O X VME-240
LAM 605-094680-37 PCB, LIGHT PEN, DT375
LAM 605-097209-002 PCB OVERTMP TNTLK 16
LAM 605-097677-001 ASSY,PCB,DC,FLTR
LAM 637-S077402-001-02 PLUSE MW CONDENSER
LAM 637-Y077415-001-00 PLUSE MW SWITCH
LAM 643-091533-001 ATTENTUATOR RF
LAM 644-000730-001 MAIN POWER RELAY
LAM 644-060873-001 RELAY, SOLID STATE, 240V, 25A
LAM 644-0731-5 RELAY, SOLID STATE (5A)
LAM 644-093274-001 TCU, POWER SUPPLY 3P, 24V
LAM 644-5863-1 RELAY 24 VOLT
LAM 644-9691-1 COUPLING, M&W CHILLER
LAM 645-006543-001 SWITCH, MAGNETIC REED
LAM 645-009512-001 SWITCH-FLOW
LAM 645-092250-001 SWITCH, HI/LOW PRESS CONTROL
LAM 645-092897-002 SWITCH, FLOW WTR PV
LAM 645-190072-001 SWITCH
LAM 645-L007792-001-00 SENSOR
LAM 649-007321-001 CAPACTOR HIGH VOLTAGE
LAM 649-250158-001 CAP.,VAC,VAR,10-1000PF,5KV
LAM 655-037642-01 CENTER ID LABEL TRICON CABINET
LAM 655-102119-00 655 GUSSET, DEMAG. ASSY
LAM 655-102121-00 MOUNT, RETAINER DEMAG ASSY
LAM 660-001131-001 5"15 VOLT POWER SUPPLY
LAM 660-00273-000 POWER SUPPLY
LAM 660-092189-001 POWER SUPPLY
LAM 660-093827-001 PWR,SPLY,600W,2,3,4,12,15VDC
LAM 660-095586-002 PWR SPLY, QUAD OUT, 300W C E CERT
LAM 660-495679-001 GEN,RF,2MHZ,2.5KW,ONEBOX
LAM 660-7612-1 POWER SUPPLY POIONEER MAGNETICS
LAM 660-900240-001 POWER SUPPLY BATTER BACK-UPS PS/2
LAM 662-008324-002 LED INDICATOR -5 TO -14 N/C
LAM 663-091342-001 BATTERY, CONTROLLER
LAM 665-092585-001 CRT, 14", SVGA
LAM 666-009941-001 SHEATED TYPE K THERMOCOUPLE
LAM 666-009941-001 SHEATED TYPE K THERMOCOUPLE
LAM 666-090837-001 TEMP SENSOR, M&W TCU
LAM 666-094735-001 THERMOCOUPLE, DUAL 1/16" J-TYP
LAM 666-S014185-001-00 CONTROL, TEMP TC
LAM 667-S000457-001-00 SENSOR, AMP WF SW1000
LAM 667-S000457-002-00 LASER, OPTOELECTRONIC SW
LAM 667-S000461-002-00 SENSOR, SW2000
LAM 667-S000462-004-00 SENSOR, ATM SW1100
LAM 668-003032-005 CONN FEMALE HEX W/ CLAMP
LAM 668-095929-002 HDR,LKG,STR,RND PIN,2POSN
LAM 668-7671-004 4 PIN CONNECTOR M-N-LOK
LAM 670-006578-001 BREAKER, CIRCUIT, 30AMP
LAM 670-008845-001 BREAKER, CIRCUIT, 15 AMP, 115V
LAM 670-091257-001 MAIN BREAKER TCU
LAM 670-093052-063 CKT BRKR,4 POLE
LAM 673-1004042 QUARTZ GLASS
LAM 673-1008304 QUARTZ
LAM 673-1010774 QUARTZ
LAM 673-1011881 SLEEVE , QUARTZ
LAM 673-1015742 BUSHING
LAM 673-Y077413-001-00 2KW PLUSE MW POWER SUPPLY
LAM 676-000504-003 MOTOR DC 12VDC 65.5:1 RATIO
LAM 676-001677-001 MOTOR 24VDC
LAM 676-S007263-001 MOTOR DRIVER
LAM 676-S007269-008 MOTOR, STEPPING EXT SW10
LAM 677-009090-001 GUARD WIRE FOR FAN 4"
LAM 678-007941-001 HEATER CARTRIDGE 120VAC 75W
LAM 678-009953-100 HEATER CARTRIDGE 100 WATT
LAM 678-009953-200 HEATER CARTRIDGE 200 WATT
LAM 678-035726-001 HEATER,WVDS GAS LINE #3
LAM 678-092469-001 HTR, TURBO PUMP, 1000 L/S
LAM 678-097988-001 HTR TMP HEATER
LAM 678-097988-901 HTR,TMP,2.2K LS,PM
LAM 678-097988-901 HTR,TMP,2.2K LS,PM
LAM 678-098055-002 HTR,V,ISLN,ANGLE,LOPRO
LAM 678-098188-001 HTR,MOD,VLV,ISO,ANGLE,4"
LAM 681-008300-001 WIRE-RF MATCH
LAM 681-S008420-030-00 HEATER CABLE
LAM 684-097280-008 CA,TMP CONT,OSAKA,2001,8 FT
LAM 684-097325-008 CA,TMP,OUT PUT,8FT
LAM 684-097326-015 CA, TMP,FAN,15M
LAM 684-097326-020 CA,TMP,FAN,20M
LAM 684-097327-008 CA,TMP FAN,8FT
LAM 684-097837-010 CA,MTR DR INTFC,EXT,10M
LAM 684-098060-020 CABLE, TMP OUTPUT 15 M
LAM 684-098702-005 CA,TMP PWR INP,CEMARK,5 FT
LAM 685-008451-001 HEAT MANOMETER REF
LAM 685-022617-001 MDL,ELEC,AMPL SS SVO,12
LAM 685-092784-001 MANOM, CPCTNC, CDL, SER
LAM 685-094027-020 MOD,ERGO LDR 6"F CASS
LAM 685-097389-001 PUMP, TURBO, 2000 LPS, SER, TGM
LAM 685-098277-001 PEN LT W/O PCB
LAM 685-495112-106 SPEC,RPM,A6,UPS,60A TCU
LAM 685-495112-110 SPEC,RPM,A6,DPI,40A TCU
LAM 685-495681-002 MATCH, VIP, UNIFIED CTLR, ONEBOX
LAM 689-025785-006 WAFER,PHOTORESIST,PROCESSED
LAM 689-025785-008 WAFER, HMDS PRIME & SPIN
LAM 690-0341-101 UNLOAD ARM TRANSFER ASSY
LAM 70-0016-001 SOCKET RELAY
LAM 70-0016-003 SOCKET RELAY
LAM 702702500 TERM BLK,SIG TWR CNTRL
LAM 71-0002-023 CIRCUIT BREAKER 1 A.25 OV. 1POL
LAM 71-0002-024 CIRCUIT BREAKER 2 A.25 071.1 POL
LAM 71-0002-025 CIRCUIT BREAKER, 3A,25071,1POL
LAM 71-0002-026 CIRCUIT BREAKER, 7A.250V.1POL
LAM 710-022051-00 710 ASSY, CORRECTOR FORMATTER CONTROL 208
LAM 710-022370-01 PCB, 710 CTI FILTER
LAM 710-028317-10 710 ASSY ID REV B SENSOR
LAM 710-037887-01 PCB, E-SERIES BMM-RIA
LAM 710-039320-00 PCB, E-SERIES DETECTORS THR 2X2
LAM 710-039354-00 710 ASSY, CORRECTOR FORMATTER 210 LWD
LAM 710-077354-001 INTERLOCK INTERFACE PCB
LAM 713-000032-001 BUSHING
LAM 713-000032-002 BEARING BUSHING SMALL
LAM 713-000130-001 GATE STOP
LAM 713-000271-002 COVER TOP RIGHT HAND 490 N/C
LAM 713-0032-2 BUSHING,
LAM 713-006305-001 HOUSING FILTER RIGHT
LAM 713-006653-001 RING, BACKUP TEFLON (PACK OF 10)
LAM 713-006654-001 WASHER WIPER RETAINER TEFLON
LAM 713-010222-001 GUAGE, BASE GAP
LAM 713-010222-002 CAL TOOL
LAM 713-011049-003 SHIELD, WINDOW UV DUAL MONOCHROM
LAM 713-011049-005 SHIELD WINDOW UV SOLO FILEER
LAM 713-011049-006 SHIELD, WINDOW UV DUAL FILTER
LAM 713-011415-001 CLAMP, LOADCOIL
LAM 713-011578-003 SLEEVE PLUNGER GUIDE
LAM 713-011585-001 COVER, CLAMP BOLT (PACK OF 10)
LAM 713-011585-001 COVER, CLAMP BOLT (PACK OF 10)
LAM 713-011585-004 COVER CLAMP BOLT
LAM 713-011666-006 RING,FOCUS/SLEEVE COMBO
LAM 713-011802-001 CLAMP
LAM 713-011802-001 CLAMP
LAM 713-011885-001 TUBE, 8" PREFORMED KEL-F
LAM 713-011924-002 SLIT,WINDOW
LAM 713-011980-001 PLUNGER HOUSING,FOCUS RING
LAM 713-012157-001 SPACER HUB
LAM 713-012546-001 COLL HOSE
LAM 713-0130-1 AIRLOCK, GATE STOP
LAM 713-013215-001 COVER ENTRANCE TUNNEL
LAM 713-013464-003 COVER, SAFETY BOWL
LAM 713-013488-001 NOZZLE BLOCK MOUNTING LEFT
LAM 713-013489-001 NOZZLE BLOCK MOUNTING RIGHT
LAM 713-015159-001 PLATE,LOAD COIL
LAM 713-017165-001 CLAMP RF CONNECTOR (RH)
LAM 713-017166-001 CLAMP RF CONNECTOR (LH)
LAM 713-017510-001 PANEL, MEMBRAIN KEYBOARD
LAM 713-017510-001 PANEL, MEMBRAIN KEYBOARD
LAM 713-017687-001 MANF,SRC CLNG WTR,SPLY,2300 MW
LAM 713-018624-302 RING, FOCUS, 6"
LAM 713-020911-001 PLUNGER, WAFER CLAMP
LAM 713-021105-002 SPACER, WAP D-SHP TAPERED PEEK
LAM 713-021267-101 PIN, CLAMP ALIGNMENT HEAD
LAM 713-025079-002 BLK,INSUL & TC MNT,L TEM
LAM 713-025086-002 PAD INSUL
LAM 713-027192-002 NUT, 1/4-20 WAP PEEK
LAM 713-027394-002 HANGER, 1/4-20 WAP PEEK
LAM 713-027396-001 WASHER, FLAT 1/4 WAP PEEK
LAM 713-028230-001 SLEEVE BANA JACK
LAM 713-028281-001 RING CONFINEMENT
LAM 713-028553-002 RING, CONFINEMENT, VESPEL
LAM 713-029022-001 SLEEVE PLUNGER
LAM 713-029100-001 PLUNGER, WAFER CLAMP
LAM 713-029101-001 RETAINER WAFER CLAMP
LAM 713-031777-001 SCREW, COVER
LAM 713-031777-001 SCREW, COVER
LAM 713-043116-001 RING, SHROUD ALLIANCE
LAM 713-043116-001 RING, SHROUD ALLIANCE
LAM 713-044035-001 WINDOW, QUARTZ VIEW PORT 9100
LAM 713-071134-001 CAP, INSULATOR
LAM 713-071355-001 CAP TARGET MTG SCR
LAM 713-071621-002 CAP, INSULATOR, HORN MTG, 17.5MM
LAM 713-071659-001 INSULATOR, SCR, HORN MTG
LAM 713-071671-004 PLUG, ISLN HORN
LAM 713-071963-001 PLUG, TGT, IN- SITU
LAM 713-073065-001 COOL DOWN COVER (F6)
LAM 713-080573-001 COV,TOP,RE575T,SK10
LAM 713-21580-1 COVER,INSULATOR
LAM 713-21581-1 BASE,INSULATOR
LAM 713-21721-1 CLAMP,LOWER
LAM 713-220525-001 WINDOW ULPA FILTER
LAM 713-240548-001 ELETD, PTCTR ESC
LAM 713-240548-001 ELETD, PTCTR ESC
LAM 713-250067-001 ROD SUPPORT FLAG
LAM 713-250585-001 ISOLATOR TEFLON GAS FEED THRU UPPER ELECTRODE
LAM 713-330153-003 ROD ADJUSTABLE CLAMPING
LAM 713-330166-001 CLAMPING ROD COVER
LAM 713-330374-001 WINDOW, SHIELD UV ENDPOINT
LAM 713-330374-002 SHLD,WDO,UV,DUAL HTD
LAM 713-330407-001 BRACKET LATCH RIGHT
LAM 713-330461-001 TCP COIL END CAP(713-330461-001)
LAM 713-347386-001 BLOCK
LAM 713-4056-001 COVER LEXAN
LAM 713-4108-1 PLUG, VENT, TEFLON
LAM 713-432006-001 COVER, MESC SIDE, ALLIANCE
LAM 713-432007-001 RETAINER, FIBER
LAM 713-460778-001 PLT,CONN MTG,UPR MATCH,CLD GDP
LAM 713-540138-001 PLATE
LAM 713-540183-002 RING, LOWER PEEK (PACK OF 10)
LAM 713-540183-002 RING, LOWER PEEK (PACK OF 10)
LAM 713-803052-001 INSERT, GAS-INTRFMTR
LAM 713-8060-1 STANDOFF GAS FEED
LAM 713-L012527-001 VACUUM, CUP LOAD POINT
LAM 713-S014180-001-03 PLATE, TEFLON
LAM 714-001313-001 SUPPORT BRACKET
LAM 714-011072-001 BRACKET SWITCH LIMIT
LAM 714-011124-001 RING HEATER GAP ADJUST
LAM 714-011222-001 SCREEN VACUUM PORT
LAM 714-011861-001 HEATSHIELD END POINT DET
LAM 714-012242-001 LATCH INNER DOOR
LAM 714-013227-004 PLATE, CONN, BLANKOFF
LAM 714-014615-008 PNL,FRT,GEN,CT,OEM,12A,OEM,650
LAM 714-015003-001 COVER
LAM 714-015055-002 COVER, UPPER, MATCH REMOVE
LAM 714-015063-002 CONN PL, UPR FD-THRU BOX ASSY
LAM 714-015079-002 COVER INTERLOCK SWITCH
LAM 714-015134-001 CONDUCTOR,GROUND
LAM 714-019489-002 PLT.CLG MTG.2300 MWAVE
LAM 714-019956-001 BRKT,MANF,PLT.CLG MTG 2300 MWA
LAM 714-021304-001 COVER
LAM 714-021836-001 ENCLOSURE, FAN, OUTER
LAM 714-022007-001 COV,BTM.CIOM ENCL.2300 MWAVE
LAM 714-022009-001 COV,SIDE,ENCL.2300 MWAVE
LAM 714-022241-001 COV,DI VME,DC SPRT
LAM 714-024512-101 COVER SOLENOID TRAY
LAM 714-024512-101 COVER SOLENOID TRAY
LAM 714-024512-103 COVER, CA TRAY
LAM 714-024513-100 ENCL, SOLENOID TRAY
LAM 714-025051-002 CVR MTCHBOX EXT ESC
LAM 714-025958-001 SUPPORT PLATE
LAM 714-028527-001 TCP M/C MATCHER COI
LAM 714-031054-002 RETAINER UNVERSAL WDO
LAM 714-032003-004 COV,BOT,LWR MTCH ENCL,A6
LAM 714-032029-001 COV,ELEK CMPNT,FRONT
LAM 714-075327-001 MILAN FIBER TWIST MODEL MILI140 CONVERTOR
LAM 714-110249-002 PL, CLP, DBL, SLD
LAM 714-110863-001 STRAP,TWR CASE P.C B/H &WLMT
LAM 714-140242-001 STANDOFF GAS FEED 2 1/2LG
LAM 714-140259-001 STRP,GROUND
LAM 714-170128-001 BRACKET
LAM 714-190320-002 SUPPORT BRACKET
LAM 714-220204-001 RGA PORT SUPPORT
LAM 714-220204-001 RGA PORT SUPPORT
LAM 714-220748-003 VENT, 4" EXHAUST
LAM 714-222405-001 SCRN, EMI, SOL TRAY COV
LAM 714-222984-001 PL,MTG,MONOCHROMATOR
LAM 714-249190-001 HGR,LWR MATCH BOX
LAM 714-249342-001 STRAP CNTOR ESC 150MM
LAM 714-330356-001 SCREEN, RF SHIELD HEAED E.P.
LAM 714-347271-001 SHIELD
LAM 714-386008-001 COV,DIP BOX/TEMP CONT
LAM 714-443235-002 PL,MTG,BICEP PWR SPLY
LAM 714-460562-002 COVER, ELCTD HSG ESC
LAM 714-460564-002 COVER, VIA LOWER ELCTD HSG ESC
LAM 714-470572-001 VENT MOUNT
LAM 714-491416-002 BRKT,MTG,RF CONT ENCL,TALL
LAM 714-491925-001 BRKT,ENCL,XFMR,A/T
LAM 714-494492-002 COV,PCB,LWR MATCH RF INTLK
LAM 714-495015-001 COVER
LAM 714-800097-004 ENCL,AC CONT
LAM 714-802247-002 COV, RF GEN
LAM 714-810225-001 COV,PCB,NODE,DUAL V
LAM 715-000001-001 CHAMBER LOAD LOCK
LAM 715-000015-002 MOUNT BASE LOAD LOCK EXIT
LAM 715-000028-002 BOTTOM PLATE
LAM 715-000102-001 PIN DOOR GATE LINKAGE IN/OUT (PACK OF 10)
LAM 715-000185-001 COUPLING
LAM 715-000764-002 PL,LIFT,3-PIN
LAM 715-000764-002 PL,LIFT,3-PIN
LAM 715-000764-703 PL,LIFT,3PIN,2300
LAM 715-00131-001 HOUSING TEMPERATURE CONTROL
LAM 715-001388-001 ACTUATOR FOOT
LAM 715-001408-001 5"ANODIZED CATHODE
LAM 715-0015-001 BASE MOUNT OUT/DOOR
LAM 715-001626-001 SUPPORT, PCT DRIVE RF
LAM 715-002041-002 GEAR PHASE CAP
LAM 715-002054-001 SHAFT, EXIT LIFTER
LAM 715-002570-001 CHAMP,FLANGE,LONG
LAM 715-003573-003 PL,OPTICAL CONN
LAM 715-004042-001 ANODE
LAM 715-005865-001 PLATE TOP 490
LAM 715-006436-001 BARRIER ION ANODIZED
LAM 715-006584-001 GEAR SPUR MOIFIED
LAM 715-006590-001 SPINDLE, LL, FEEDTHRU
LAM 715-006590-001 SPINDLE, LL, FEEDTHRU
LAM 715-006602-001 HOUSING SEAL QUALRIM
LAM 715-007514-001 SPACER BRAKE
LAM 715-007528-001 FLANGE, MOUNT, GATE DRIVE CYLINDER
LAM 715-009128-005 ELECTRODE PLATE (715-9128-005)
LAM 715-009161-001 LIFTER, WAFER
LAM 715-009306-004 FOCUS RING
LAM 715-009306-005 FOCUS RING
LAM 715-009898-001 EDGE RING 5
LAM 715-0102-1 PIN,
LAM 715-010202-001 PLATE,JACKING SCREW
LAM 715-010213-002 TOOL CAL EDGE SNSR, 1.49
LAM 715-010237-006 DISC CALIBRATION APM
LAM 715-011005-001 HOUSING-GAP ADJUST
LAM 715-011016-001 HINGE,BOTTOM,CHAMBER
LAM 715-011035-001 PLATE, HEX, LOWER, RE
LAM 715-011039-001 RETAINER-WINDOW
LAM 715-011039-002 RETAINER UNIVERSAL WINDOW
LAM 715-011039-004 RETAINER, HEATED E.P. WINDOW
LAM 715-011051-001 FRAME, CHAMBER, WINDOW
LAM 715-011051-001 FRAME, CHAMBER, WINDOW
LAM 715-011059-001 RING ORIFICE ANNODIZED
LAM 715-0111173-001 CALIBRATION FLAG FOR GAP
LAM 715-011126-001 BRACKET ENCODER
LAM 715-011213-001 PLATE, VENT PORT 90DEG LOADLOCK
LAM 715-011214-001 PLATE VENT PORT 180DEG
LAM 715-011229-003 PLATE, SEAL, EXIT LOADLOCK
LAM 715-011420-001 PLATE
LAM 715-011492-005 HOLDER WAFER 5"
LAM 715-011502-001 COOLING RING
LAM 715-011504-001 BAFFLE, UPPER
LAM 715-011521-001 BRACKET POU GAS FILTER
LAM 715-011531-009 ELECTRODE, ANODIZED
LAM 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED
LAM 715-011531-014 ELECTRODE, AL, UPPER
LAM 715-011531-014 ELECTRODE, AL, UPPER
LAM 715-011531-016 UPPER ELECTRODE
LAM 715-011531-102 ELECTRODE, UPPER, ANOD
LAM 715-011532-006 (R)PLATE UPPER SEAL
LAM 715-011559-262 WAFER CLAMP
LAM 715-011565-001 BOLT, CLAMP RETAINING
LAM 715-011565-003 BOLT
LAM 715-011570-001 SHIELD
LAM 715-011582-001 BAFFLE PLATE, LOWER AL
LAM 715-011590-001 PLATE,LOWER BAFFLE 6
LAM 715-011593-002 PLATE,SEAL,4420
LAM 715-011597-001 5MIL ELECTRODE AL AN
LAM 715-011613-002 BAR, STOP
LAM 715-011626-001 RING, COOLING LOWER ELECTRODE
LAM 715-011630-001 ELECTRODE , BOTTOM
LAM 715-011630-001 ELECTRODE , BOTTOM
LAM 715-011639-008 CAP, ELECTRODE, LOWER, 4400
LAM 715-011639-508 CAP, LWR, ROUGH, 858STR
LAM 715-011640-006 RING, AL-ANDZ LWR FOCUS ELCTD
LAM 715-011664-006 ELCTRD, LWR CAP, 6-IN NO ANDZ FLAT AL
LAM 715-011665-006 ANODE
LAM 715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL
LAM 715-011746-142 PLATE, 4" .010 DOME REDUCED HGT
LAM 715-011823-001 ROD-MECHANICAL STOP 8.50
LAM 715-011825-001 LOWER CHAMBER PLATE
LAM 715-011858-001 PLATE WINDOW END POINT DET
LAM 715-011902-001 BAFFLE PLATE
LAM 715-011909-501 ELECTRODE, SI, CAPTIVE
LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858
LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858
LAM 715-011913-083 PLATE, BAFFLE LOWER
LAM 715-011913-083 PLATE, BAFFLE LOWER
LAM 715-011913-501 BAFFLE, LOWER
LAM 715-011913-555 BAFFLE, LOWER, 4420,STR,858
LAM 715-012025-001 SPACER 0-RING
LAM 715-012101-008 HOLDER,W/F 8",ARM EXIT
LAM 715-012111-002 COVER ARM HSG (CABLE DRIVE)
LAM 715-012126-001 TUBE ARM DRIVE
LAM 715-012165-005 5"HOLDER WAFER 5" TIGHT POC
LAM 715-012165-008 ARM, TIGHT POCKET ELL
LAM 715-012223-001 SHAFT GROVVED INNER PLATE
LAM 715-012233-002 GATE-HARD ANODIZE INNER
LAM 715-012243-001 BLOCK LATCH
LAM 715-012245-001 PIVOT, GATE, INNER
LAM 715-012251-001 BAR LATCH SOLENOID RELEASE
LAM 715-012254-001 BEARING, LATCH SOLENOID RELEASE
LAM 715-012322-001 OUTER DOOR FOR GATE DRIVE
LAM 715-013295-001 HSG,ADJ, WFR LIFT
LAM 715-013477-001 PLATE, MOUNTING
LAM 715-013718-006 CHUCK SPINNER 6"
LAM 715-013718-016 ASSY ELECTRODE
LAM 715-013772-001 COLLAR PINNED LIFTER 6"(462
LAM 715-014074-002 BLOCK MTG , GAS NOZZLE
LAM 715-014556-031 GASKET,ORIFICE
LAM 715-015092-001 BLOCK,THREADED,SEED
LAM 715-015216-001 TUBE ADAPTER
LAM 715-0166-001 CYLINDER, ARM-AIR
LAM 715-018611-117 CAP, LWR, ELECTRODE, 8"
LAM 715-018906-002 ELECTRODE, BOTTOM, BELLOW
LAM 715-018917-001 HOLDER,W/F CLAMP(462
LAM 715-018991-006 ELECTRODE, ALUMINUM, ANODIZED
LAM 715-019939-002 TUBE,MANF TO MCRWV SOURCE
LAM 715-019940-002 TUBE,MANF FROM MCRWV SOURCE
LAM 715-019942-002 TUBE,MANF TO MCRWV VLVE FROM G
LAM 715-019943-001 TUBE,MANF TO TEE FROM CHMBR
LAM 715-019944-004 TUBE,VLV TO TEE TO CHMBR
LAM 715-019945-002 TUBE,VLV TO CHMBR
LAM 715-021092-001 SPACER
LAM 715-021274-008 CAP, LOWER ELECTRODE 8IN
LAM 715-021400-002 COVER, 180 DEG LOADLOCK, P.S. MOD
LAM 715-021507-1 CONNECTOR,MALE,VCR,MOD.
LAM 715-021719-001 COVER BELL JAR ISO ETCH
LAM 715-024347-100 PLATE,SPRT,V65,V65A,V75,V75A
LAM 715-025106-001 PLATE- LOWER BAFFLE, ESC
LAM 715-028087-005 SHROUD HARD ANODIZED
LAM 715-028420-001 CAP, L ELECTRODE FLAT PROCESS
LAM 715-028486-001 PLATE UPPER SEAL 6' ELECTRODE
LAM 715-028559-001 SHOWER HEAD 6" 4620
LAM 715-028616-001 PLATE LOWER BAFFLE 8" BOLTED
LAM 715-028620-001 PROBE, THERMAL WELL
LAM 715-028735-001 TRIPPLE BAFFLE, UPPER 852
LAM 715-028852-001 RING,CLAMP UPPER
LAM 715-030079-001 DISC. CLAMP
LAM 715-030106-006 EDGE RING
LAM 715-030106-008 RING, EDGE. 8"
LAM 715-030136-003 RING, EDGE ESC
LAM 715-031023-001 SPATULA EXIT SIDE 9600 SMIF
LAM 715-031055-001 BLK, HTD ENDPOINT
LAM 715-031513-002 RING, 1/4 TURN
LAM 715-031705-006 SPACER, SHIELD, RF
LAM 715-031753-001 ELECTRODE
LAM 715-031753-001 ELECTRODE
LAM 715-031777-002 SCREW 6-32 CPV ANODIZED
LAM 715-031960-007 PLUNGER,1/4 TURN (ANODIZED)
LAM 715-031984-003 ENDPLATE, SMALL WINDOW CHAMBER
LAM 715-031988-001 PLATE,FOR TURBO,MANOMETER SIDE
LAM 715-032012-003 PLATE, WINDOW, CHAMBER LGR
LAM 715-032012-004 END POINT WINDOW ASSY
LAM 715-032758-002 EXT ARM,PADDLE SPHERE BR G PLTD
LAM 715-032789-001 COV, TK, WTR VAPOR DLVY SY
LAM 715-038611-002 DC, BIAS PIN HOLDER
LAM 715-06213-001 SHOWER HEAD
LAM 715-062533-002 CH, CLP, COMPL, CLOS
LAM 715-072302-001 PUMP, COMPOND MOLECULAR
LAM 715-0725-001 CATHODE ANODIZED
LAM 715-07898-001 FOOT
LAM 715-080387-001 ARM, WAFER, XPORT, UNIV, 6IN, 384T
LAM 715-080554-001 PL,MT,U,ESC,ASIQ/384T
LAM 715-090184-001 SCREW, SOCKET HEAD ARM (PACK OF 10)
LAM 715-110336-002 PLATE, OUTER, GATE, SEAL
LAM 715-11059-001 RING, ORFICE
LAM 715-110709-001 PLATE, ADAPTER
LAM 715-110765-001 MTG R,AUTOTUNE 4520,L BRKT
LAM 715-11504-001 PLATE PERF ALUMINUM
LAM 715-11531-002 SHOWER HEAD
LAM 715-11629-006 LOWER CAP ELECTRODE 6"
LAM 715-11649-002 BOLT, ORIFICE RING
LAM 715-11901-005 PLATE
LAM 715-12254-001 BEARING, LATCH SOLENOID RELEASE
LAM 715-140079-001 PLATE, SEAL, UPPER ELECTRODE, 4600
LAM 715-140099-001 ESC WATER JACKET
LAM 715-140124-001 BAFFLE, UPPERTPL SET
LAM 715-140125-001 BAFFLE, LOWER OF THREE
LAM 715-140126-001 BAFFLE, TPL SET
LAM 715-140144-002 RING, CPLG, LVLG, EXP, 6, JDA
LAM 715-140153-008 RING, COUPLING, ESC 8", JDA
LAM 715-140287-001 RING,CLMP,UPR,ELECTRODE
LAM 715-140350-010 LOWER ELECTRODE CAP
LAM 715-14042028 ELECTD,AL,ANDZ,8 INCH
LAM 715-140421-026 ELECTRODE ALUMINUM 6"
LAM 715-140485-006 ELCTD (SPCL), AL, ANDZ, 6
LAM 715-160153-002 PLT MTG AUTOTUNE MATCH
LAM 715-2007-001 PIN, HINGE
LAM 715-220249-001 BRACKET, COOLING LINE, HOLD DOWN
LAM 715-220438-002 SLEEVE,FILTER,GAS FEED
LAM 715-220438-002 SLEEVE,FILTER,GAS FEED
LAM 715-222451-003 SHUTTER ARM
LAM 715-24349-100 PLATE SUPPORT
LAM 715-249241-001 SCR,GDE,LWR ELCTD,ESC
LAM 715-250544-001 GRID GROUND W/15MM HOLES FOR 9500
LAM 715-28681-001 SEAL PLATE
LAM 715-28686-001 SEAL PLATE
LAM 715-28686-002 SEAL PLATE
LAM 715-30079-001-1 TOOL, DISK CLAMP
LAM 715-300825-006 LINER, CHAMBER
LAM 715-330000-070 RING GAS INJECTION
LAM 715-330000-090 RING, GAS DISTRIBUTION
LAM 715-330000-090 RING, GAS DISTRIBUTION
LAM 715-330087-001 GAS INJECTION RING
LAM 715-330092-002 COV, NUT, BOT GAS FD W/O SLOT
LAM 715-330133-001 RING UPPER CHAMBER FIXED GAP
LAM 715-330135-001 R, BOT GAS INJ, ESC
LAM 715-330151-004 RING,ACTR
LAM 715-330152-003 SPRING ADJUSTABLE HOUSING
LAM 715-330161-002 SHLD RING
LAM 715-330161-002 SHLD RING
LAM 715-330164-006 ADJUSTMENT PLATE
LAM 715-330166-003 COV, ROD, CLPG, AL, B.A.C. (PACK OF 3)
LAM 715-330302-001 SEAL GAS FEED REAR
LAM 715-330312-001 RING, RETAINING CLIP
LAM 715-330354-002 BLK,HTD ENDPOINT
LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM
LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM
LAM 715-330773-001 LID ASSEMBLY
LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I
LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I
LAM 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE
LAM 715-360268-001 PL,CHMBER TO VLV
LAM 715-4042-001 ANODE, 8"
LAM 715-412298-001 STUD, HOLD DOWN, 1/2-13X10.0, STL
LAM 715-412472-001 SPCR,MON,ALLI 6
LAM 715-42859-001 FIXTURE CENTERING RETICLE
LAM 715-442006-001 RING, RETAINER, O-RING
LAM 715-443098-001 RING, CLP, UPPER ELECRTRODE
LAM 715-443130-001 RING FOCUS OUTER AL EXELAN
LAM 715-443130-001 RING FOCUS OUTER AL EXELAN
LAM 715-443131-001 RING, GROUNDING ALUM
LAM 715-443178-202 R,EDGE,HOT,8FLAT
LAM 715-443202-001 RING, COUPLING, ESC, JEIDA, 8
LAM 715-460552-002 LINER, CHAMBER LOWER 9100/A6
LAM 715-460553-002 LINER, CHAMBER UPPER 9100/A6
LAM 715-460559-004 PIN, SUPPORT HTD LNR HASTELLOY
LAM 715-460578-001 LIFTER, WAFER 4-PIN
LAM 715-461022-001 R, CLG, ESC, UNIV
LAM 715-470821-001 PL,MTG,V,AIR OPR,GAS PALLET
LAM 715-495014-001 LINER,CHAMDER,TRNSN MANF,ADPTR
LAM 715-540057-001 TEE
LAM 715-626-1 LIFTER PISTON
LAM 715-654-1 LIFTER PISTON END
LAM 715-6602-1 HOUSING ARM SHAFT
LAM 715-666-1 LIFTER LOWER PISTON
LAM 715-802530-001 PL,ADAPT,DN200,VLV TO CHMBR
LAM 715-803220-001 SHLD,GND,DFC,300MM
LAM 715-803220-003 SHLD,GND,DFC,300MM
LAM 715-9034-1 LIFTER TOP PLATE
LAM 715-L011123-001 PLATE, CLAMP BOWL NUT
LAM 715-L011125-001 SPROCKET
LAM 715-L011628-001-00 DIVDER, FLOW
LAM 715-L011649-002 BOLT ORIFICE RING
LAM 715-L011914-001 RING, FILLER UPPER ELECTRODE,NIT
LAM 715-S010416-001 WET PINS
LAM 715-S031752-001-00 PLATE, BAFFLE UPPER NIT
LAM 715-S031754-001-00 PLATE, BAFFLE LOWER NIT
LAM 716-001163-001 RING, WAP2&3 10.35 ELECTRODE FUSED QTZ
LAM 716-001700-001 QUARTZ WINDOW
LAM 716-001835-001 INSULATOR GAP H0USING
LAM 716-001981-001 PLUNGER, LWR WFT CLAMP, KEL-F LCH
LAM 716-002483-188 INSR, FOC R, AL 203, FL, 200MM
LAM 716-003687-188 INSERT, FOCUS RING 200MM
LAM 716-003773-001 RING, WAP4 TWIST-N-LOK
LAM 716-005204-001 RING, WAP1 SMALL 10.35 ELECTRODE QTZ
LAM 716-005205-003 PLATE, COVER STEP QTZ
LAM 716-007136-001 RING, QUARTZ, UPPER, HP
LAM 716-011009-001 QUARTZ WINDOW
LAM 716-011036-001 RING, FILLER, LOWER
LAM 716-011057-002 RING,FILLER,UPPER
LAM 716-011543-003 PLATE, CER W/C ATTACHMENT
LAM 716-011563-162 CLAMP, 6-IN DOMED 1.5-MM
LAM 716-011563-168 DOMED WAFER CLAMP 6
LAM 716-011564-003 UPPER ELECTRODE
LAM 716-011573-004 PLUNGER-1/4 TURN 4420/9600
LAM 716-011623-001 RING CLAMP LOWER ELECTRODE
LAM 716-011623-001 RING CLAMP LOWER ELECTRODE
LAM 716-011624-001 RING, LOWER INSULATOR
LAM 716-011624-001 RING, LOWER INSULATOR
LAM 716-011624-005 RING,INSUL,ELEC,RDCD,HGT
LAM 716-011638-005 RING FOCUS THIN EDGE
LAM 716-011643-001 RING, CER INSUL LWR ELECTRD
LAM 716-011651-005 RING, ENDGE WAGER CLAMP 5.00
LAM 716-011651-006 RING,EDGE,WAFER,CLAMP 6.00"
LAM 716-011651-006 RING,EDGE,WAFER,CLAMP 6.00"
LAM 716-011671-001 CLAMP RETAINER 1/4 T
LAM 716-011683-008 FOCUS RING
LAM 716-011750-151 5"RING INSERT
LAM 716-011830-006 FOCUS RING,6" ALUMINA W/C
LAM 716-011830-008 RING, FOCUS (ALUMINA) 8" WAFER CLAMP
LAM 716-011889-161 CLAMP, WAFER 6
LAM 716-011909-504 PL, UPR, ELCTD, POLISH, 8 IN
LAM 716-011922-001 PLATE
LAM 716-011923-001 PLATE,WFR,CLAMP,ATTACH
LAM 716-011963-003 PLATE, CLAMP ATTACHMENT
LAM 716-011999-281 PLATE,LWR WAFER CLAMP,8''
LAM 716-012640-003 QUARTZ PLATE
LAM 716-013731-001 APM, LIFTER PAD
LAM 716-013935-118 INSR,BAFL, UV SHLD, 2300 MW ST
LAM 716-015098-001 INSULATION ELBOW LOWER MATCH
LAM 716-015597-001 RING, COVER WAP DFC 200 MM QTZ
LAM 716-016830-002 RING, WAP TWIST TOP STEP QTZ
LAM 716-016831-002 RING, WAP GENERIC QUARTZ
