产品详情
ZR中国用于无氧焊接,纯水超声波清洗,
洁净室半导体用高纯净型压力表
高纯净型压力表YTJ
High Purity Pressure Gauge
型号标示Model: YTJA YTJB YTJE
产品概述Brief introduction：
YTJ 高纯净型压力表主要应用于半导体领域。产品根据洁净度等级，可分为 (YTJA) A 级 (YTJB) / BA 级(YTJE) / EP 级3 种类型
The gauge is mainly used in semiconductor. It could be sorted to three kinds as class A, class BA and class EP by their purity degrees
◆ 根据使用特性可选择SUS316Ti、SUS316、SUS316L 等不同材料的测压元件。
It could choose the pressure elements of SUS316Ti, SUS316, SUS316L by your demand.
◆ 支持G1/4、NPT1/4、9/16-18UNF、1/4VCR（M）、1/4VCR（F）等多种连接形式。
It supports connection types as G1/4, NPT1/4, 9/16-18UNF, 1/4VCR(M), 1/4VCR(F) and so on.
◆ 所有零部件都经过超声波纯水处理。
All the parts would be dealt with by ultrasonic pure-water.
◆ 选用无氧真空室的高纯氩气保护焊接作业 。
Protect welding work with the high purity argon.
◆ 产品经过严格的耐压及气密性检测。气密性可达到1 × 10-10 Pa·m3/s。
With strict detection of compression resistance and airproof which could achieve 1 × 10-9 Pa·m3/s.
◆ 测量范围：-0.1~0 至0-35MPa。
Measure ranges: 0.1~0MPa to 0-35MPa.
◆ 示值精度：1.5%；2.5%。
Accuracy: 1.5%; 2.5%.
高纯净表洁净度等级The Clean Grade of the High-Purity Pressure Gauge
无氧焊接Welding without oxygen
A 级A Grade :
清洗：药液超声波清洗，纯水超声波清洗
Washing: Clean with medicine liquid ultrasonic, pure water ultrasonic washing
组装调试：洁净室（洁净度10000）
Installation and debugging: Clean room (Clean Grade 10000)
包装：N2 气体吹扫，密封包装
Package: N2 gas b away, seal package
纯水超声波清洗 Pure water ultrasonic washing
BA 级BA Grade:
零件：（气体接触部位）机械抛光处理
Part: (Gas contact part) machine polishing
清洗：药液超声波清洗，纯水超声波清洗
Washing: Clean with medicine liquid ultrasonic
洁净度：等级VI（ASME B40，1 Level）
Clean Grade: VI (ASME B40,1 Level)
组装调试：洁净室（洁净度10000 ISO Class4）
Installation and debugging: Clean room (Clean Grade 10000 ISO Class4)
工作台（洁净度100 ISO Class2）
Working desk (Clean Grade 100 ISO Class2)
包装：N2 气体吹扫，PET 袋真空密封包装
Package: N2 gas b away, seal package with vacuum PET bag
洁净室操作Clean room operation
EP 级EP Grade:
零件：（气体接触部位）电解抛光
Part: (Gas contact part) electrolyte polishing
清洗：药液超声波清洗，纯水超声波清洗
Washing: Clean with medicine liquid ultrasonic
洁净度：(ISO Class 1) 在0.1 μm以上的肉眼不可见微粒子数量10 个以内。
Clean Grade: (ISO Class 1) less than 10 corpuscule which is bigger than 0.1μm can not seen with people eyes.
组装调试：洁净室（洁净度1000 ISO Class3） 工作台（洁净度100 ISO Class2）
Installation and debugging: Clean room (Clean Grade 1000 ISO Class3)
Working desk (Clean Grade 100 ISO Class2)
包装：N2 气体吹扫，PET 袋真空密封包装
Package: N2 gas b away, seal package with vacuum PET bag
几种规格产品 Several Specification
径向直接安装AO Stem mounting; bottom connection
轴向嵌装ZT Flush mounting; back connection
量程范围规格代码表 TABLE OF RANGES
选型代码code 量程规格ranges
M510 -0.1-0.06 MPa M030 0.1 MPa M160 10 MPa
M515 -0.1-0.1 MPa M040 0.16 MPa M180 16 MPa
Ｍ520 -0.1-0.15 MPa M60 0.25 MPa M200 6 MPa
Ｍ530 -0.1-0.3 MPa M080 0.4 MPa M220 10 MPa
M540 -0.1-0.5 MPa M100 0.6 MPa M230 16 MPa
M550 -0.1-0.9 MPa M120 1.0 MPa M240 25 MPa
M560 -0.1-1.5 MPa M140 1.6 MPa M260 35 MPa
M570 -0.1-2.4 MPa
Kg/psi; KPa/psi; psi/bar 刻度标示可选available
仪表外型尺寸及连接示意图Type, dimension and connection scheme
连接Connection G1/4、NPT1/4、9/16-18UNF
连接Connection 9/16 -18 UNF(M) 1/4 VCR(M)
连接Connection 1/4 VCR(F)
如何选型 HOW TO ORDER
型号代码特性说明 CODE CHARACTERISTICS设
基本型号Basic type
YTJA A 级不锈钢洁净型压力表Stainless Steel clean type pressure gauge
YTJB BA 级不锈钢洁净型压力表Stainless Steel clean type pressure gauge
YTJE EP 级不锈钢洁净型压力表Stainless Steel clean type pressure gauge
外径Diameter
040 Ф 40mm
050 Ф 50mm
安 装 方 式Mounting
AO 径向无边 Stem mounting, bottom connection, no flange
ZO 中轴向无边 Flush mounting, back connection, no flange
ZT 中轴向前边 Flush mounting, back connection, front flange
设计代码Design
54 不锈钢外壳，旋紧式Stainless Steel case, screw type
量 程Diameter
M120 1MPa 详见量程代码表 See the table of range
连 接 螺 纹Connection
G1/4 G1/4” Z14 NPT1/4” U10 9/16-18UNF
V20 VCR(M) V30 VCR(F)
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